Christian Militzer
CVD coating technology research expert
SGL Carbon
Dr. Christian Militzer has studied chemistry at Chemnitz University of Technology and performed his PhD research on the topic of atomic layer deposition for protective coatings. He is currently with SGL Carbon GmbH working as a CVD coating technology research expert, driving the innovative coating R&D activities. His main focus is the development of novel and improved coating materials and processes and providing improved performance and lifetime to SGL Carbon’s semiconductor customers.
Presentations
Next-Generation SiC coated graphite components for SiC epitaxy
The SiC and GaN power electronics revolution is driving SGL Carbon’s R&D on novel and improved materials in support of multiple processes along the semiconductor value chain. One of SGLs focus areas is SiC and GaN epitaxy, in which SiC-coated graphite parts are used as susceptor and reactor components. The high temperatures and chemically aggressive gases in SiC and GaN epitaxy limit the lifetime of state-of-the-art SiC coating. To improve the resistance against chemical etching and mechanical degradation, SGL has developed next-generation SiC coating with drastically reduced pinhole etching and coating chipping, enabling enhanced performance and a prolonged component lifetime.